Process Notes
Measurement results
- EEC146A Electrical Characterization Measurements (Updated on Dec 11, 2015)
- Fall 2015 EEC146A Measurement results
- Spring 2017 EEC146A Measurement results
Photoresist Adhesion
Photoresist processing
- Spin Coating
- Softbake
- Photoresist Optical Parameters
- Photoresist baking
- Photoresist coating
- Hardbake
- Exposure
Development
Fabrication Notes
Photoresist Information
- Photoresist Storage Aging, Refilling, and Dilution
- High-Resolution Photoresist Processing
- Photoresist Rehydration
- General Properties of AZ/TI Photoresists
Etching
- Wet Chemical Etching
- HF Etching
- Gold Etching
- Dry Etching Photoresist
- Aluminum Etching
- Chromium Etchinge
- Silicon Etching
