Training Matrix

  • Additional or repeated training may be required if the staff notes user deficiencies.
  • Times are approximate, and actual staff training time will be billed per user.
  • Training Charge = (number of sessions)x(approx. session duration)x(Staff rate)

Equipment

Training Contact

Minimum Number of Sessions

Approx. Session Duration (Hrs)

General Training Sessions      
Safety Tour Paula 1 1.5
Basic Photolithography  Yusha 1 1.5
Photolithography with Metal Liftoff Yusha 1 7
Wet Bench Ryan 1 1.5
Lithography      
CEE Model 100 Spinner Yusha 1 0.5
Brewer (1 and 2) Yusha 1 0.5
Solitec 5110-CT (1 and 2) Yusha 1 0.5
Karl Suss MA4 Aligner (1 and 2) Yusha 2 1
EVG 620 Mask Aligner Yusha 2 1
GCA 8500 i-line Wafer Stepper Yusha 3 1
DEPOSITION      
CHA AutoTech II E-Beam Evaporator Chan 2 3.5
Lesker Labline Sputter (DC only) Chan 2 3.5 
Lesker Labline Sputter (RF and reactive) Chan 1 (prior DC training required)  4
AV Vision 310 PECVD Chan 2 1
Plasmatherm Versaline HDPCVD Chan 2 2
ETCHING      
AV Apex SLR RIE/ICP Yusha 2 1
AV Apex SLR RIE Yusha 2 1
AV Vision 320 RIE Yusha 2 1
Plasmatherm Versaline Deep Si Etcher Yusha 2 1
Plasma Equip. Tech. Services (PETS) RIE Yusha 2 0.5
SPTS XactiX e1 Yusha 2 0.5
DPSS Laser Yusha 2 1
Idonus HF Vapor Phase Etch System Yusha 1 0.5
ANALYTICAL      
Bruker Dektak XT Chan 1 1
Nanospec AFT Chan 1 0.5
Dektak 3ST Surface Profilometer Chan 1 1
J.A. Woollam M-2000 Chan 1 1.5
THERMAL       
Allwin AW610 Rapid Thermal Processor Chan 1 1.5
Annealsys AS-One 100 HT Rapid Thermal Processor Chan 1 2
Yamato Scientific America DP63 Programmable Oven Yusha 1 0.5
500C Oven Yusha 1 0.5
PACKAGING      
Disco DAD 321 Dicing Saw Chan 2 3
Tousimis Autosamdri-815 Yusha 1 2
EVG 501 Bonder Yusha 1 0.5
EVG 810 Plasma Activation Yusha 1 0.5
CLEANING AND PREPARATION      
Semitool PSC-101 Spin Rinse Dryer Yusha 1 0.5
MICROSCOPY      
FEI 430 NanoSEM Ryan 2 2
Electron Beam lithography  Ryan 3 2
FEI Scios DualBeam SEM/FIB  Andrew 2 2
EDS and EBSD materials characterization  Andrew 2 2
Quorum Tech Q150RES  Ryan 1 0.5
Zeiss Axiotron Optical Microscope (1 and 2) Yusha 1 0.5
Nikon Optical Microscope Yusha 1 0.5
ELECTRICAL TEST      
HP 4155a Analyzer and Probe Station Yusha 1 1
Probex 4pt Probe Yusha 1 0.5

 

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