Billing Information

Tools and equipment at CNM2 may be used after completion of general cleanroom training as well as training on tools needed within the cleanroom. Members are reminded that qualification to enter the lab or use a tool does not imply skill sufficient to accomplish any particular experimental goal. Rather, it represents a “fishing license”, an opportunity to explore the lab and tools inside without presenting an undue threat to self, others or the equipment.

■ UC Users: Cleanroom Access

  • $20/hour for cleanroom access hourly charges + $50/month for membership fee,
    Safety Orientation will be billed at 1 hour of cleanroom time.
    Total capped: $1000/month (per person)
  • $58/hour for staff services, no limit
  • Equipment charges are separate additional charges to the time spent in the cleanroom:

EquipmentRate
(Overall usage cap: $800/month)Etching Analytical Thermal and Growth Packaging Cleaning and Preparation Electron Microscopy 

Lithography  
Brewer1
Brewer2
Solitec1
Solitec2
KSuss_MA4-1
KSuss_MA4-2
EVG 620 Mask_Bond Aligner
GCA I-Line Wafer Stepper
        $0.17/min       $10/hr
        $0.17/min       $10/hr
        $0.30/min       $18/hr
        $0.30/min       $18/hr
        $0.42/min       $25/hr
        $0.42/min       $25/hr
        $0.67/min       $40/hr
        $0.67/min       $40/hr
Deposition  
CHA-Ebeam
Lesker_Sputter
        $0.50/min       $30/hr
        $0.50/min       $30/hr
Gold_carbon sputter coater         $-
Etching  
DPSS UV Laser (Canon 2)
Plasmatherm790_RIE
Technics_RIE
Xactix_XeF2_Etch
Fluorine RIE
PT_Versaline_DSE
        $0.42/min       $25/hr
        $0.33/min       $20/hr
        $0.33/min       $20/hr
        $0.83/min       $50/hr
        $0.67/min       $40/hr
        $0.67/min       $40/hr
Analytical  
Dektak_3030
Dektak XT
Ellipsometer
Nanometrics
        $0.30/min       $18/hr
        $0.42/min       $25/hr
        $0.33/min       $20/hr
        $0.30/min       $18/hr
Thermal and Growth   
AS-One RTP
Programmable Oven
Rapid_Thermal_Processor
        $0.67/min       $40/hr
        $-
        $0.67/min       $40/hr
Packaging  
DicingSaw
EVG 501 Bonder
EVG 810 Plasma Activation
        $0.50/min       $30/hr
        $0.83/min       $50/hr
        $1.00/min       $60/hr
Critical point dryer
Spin_Rinse_Dryer_3
        $0.67/min       $40/hr
        $0.02/min       $1/hr

 

■ UC Users: Microscopy and Non-Cleanroom lab Access

  • No charges for cleanroom access or membership fee
SEM FIB
$118/hour for Training rate
$60/hour for SEM/EBL
$600/month for SEM/EBL monthly cap
$103/hour for Training rate
$45/hour for Daytime use (8am-8pm)
$30/hour for Nighttime use (8pm-8am)
$240/night for Nighttime use (8pm-8am) cap

 

■ Non-UC or Industrial Users

  • $60/hour for cleanroom access hourly charges, no limit
  • $92/hour for staff services, no limit
  • $30/hour for student assistant services, no limit
  • $102/hour for SEM, no limit
  • $75/hour for FIB, no limit
  • Additional campus overhead applied to all external rates at time of service – current rate 33.7%.

Equipment in the lab is offered on an “as-is” basis, with no warranties expressed or implied. It is the labmember’s responsibility to understand tools’ features, operation and limitations. That being said, staff are available for free project consultations.

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