Billing Information

Tools and equipment at CNM2 may be used after completion of general cleanroom training as well as training on tools needed within the cleanroom. Members are reminded that qualification to enter the lab or use a tool does not imply skill sufficient to accomplish any particular experimental goal. Rather, it represents a “fishing license”, an opportunity to explore the lab and tools inside without presenting an undue threat to self, others or the equipment.

■ UC Users: Cleanroom Access

  • $20/hour for cleanroom access hourly charges + $50/month for membership fee,
    Total capped: $1000/month (per person)
  • $58/hour for staff services, no limit
  • Equipment charges are separate additional charges to the time spent in the cleanroom:
Equipment Rate
(Overall usage cap: $800/month)
Lithography
Brewer1
Brewer2
Solitec1
Solitec2
KSuss_MA4-1
KSuss_MA4-2
EVG 620 Mask_Bond Aligner
GCA I-Line Wafer Stepper
        $0.17/min       $10/hr
        $0.17/min       $10/hr
        $0.30/min       $18/hr
        $0.30/min       $18/hr
        $0.42/min       $25/hr
        $0.42/min       $25/hr
        $0.67/min       $40/hr
        $0.67/min       $40/hr
Deposition
CHA-Ebeam
Lesker_Sputter
        $0.50/min       $30/hr
        $0.50/min       $30/hr
Etching
DPSS UV Laser (Canon 2)
Plasmatherm790_RIE
Technics_RIE
Xactix_XeF2_Etch
        $0.42/min       $10/hr
        $0.33/min       $20/hr
        $0.33/min       $20/hr
        $0.83/min       $50/hr
Analytical
Dektak_3030
Dektak XT
Ellipsometer
Nanometrics
        $0.30/min       $18/hr
        $0.42/min       $25/hr
        $0.33/min       $20/hr
        $0.30/min       $18/hr
Thermal and Growth
AS-One RTP
Programmable Oven
Rapid_Thermal_Processor
        $0.67/min       $40/hr
        $-
        $0.67/min       $40/hr
Packaging
DicingSaw
EVG 501 Bonder
EVG 810 Plasma Activation
        $0.50/min       $30/hr
        $0.83/min       $50/hr
        $1.00/min       $60/hr
Cleaning and Preparation
Critical point dryer
Spin_Rinse_Dryer_3
        $0.67/min       $40/hr
        $0.02/min       $1/hr
Electron Microscopy
Gold_carbon sputter coater         $-

 

■ UC Users: Microscopy and Non-Cleanroom lab Access

  • No charges for cleanroom access or membership fee
SEM FIB
$118/hour for Training rate
$60/hour for SEM/EBL
$600/month for SEM/EBL monthly cap
$103/hour for Training rate
$45/hour for Daytime use (8am-8pm)
$30/hour for Nighttime use (8pm-8am)
$240/night for Nighttime use (8pm-8am) cap

 

■ Non-UC or Industrial Users

  • $60/hour for cleanroom access hourly charges, no limit
  • $92/hour for staff services, no limit
  • $30/hour for student assistant services, no limit
  • $102/hour for SEM, no limit

Equipment in the lab is offered on an “as-is” basis, with no warranties expressed or implied. It is the labmember’s responsibility to understand tools’ features, operation and limitations. That being said, staff are available for free project consultations.

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